Main Products:
Electrode Si / SiC
Ring Si / SiC / Quartz
Applicator Quartz / Sapphire
Sapphire Applicator Tube
SA7610QTZ2
SA7610QTZ4
SA7610QTZ6
SA7610SAPP3
SA7610SAPP6
SA7610SAPP7
LAM Silicon Electrode
839-011906-001
839-011906-002
839-011906-100
839-011906-902
839-443215-502
839-011907-001
839-011907-111
839-443215-504
Quartz Tube
0190-02635
0190-34419
0190-37894
0040-71417
3750-01144
3750-01112
5010-3900430
5010-3900490
Quartz Applicator Tube
765-065782-001
765-065782-002
765-013511-001
765-013511-003
765-013511-004
765-013511-005
790-097959-001
790-097959-002
Chemical Downstream Plasma Source
AX7610
AX7610LRC-S
AX7610-5-REV 1L
AX7610LRC-Q
AX9013
AX9016
716-140141-261, Hot Edge Ring
1D10-309946-12, DRM Focus Ring
Ring Upper Ground SiC
Y2O3 Top Ring
Y2O3 Bottom Ring
