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What's the function of Semiconductor Silicon Electrode and Showerhead?
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The showerhead is a structure used in plasma processing. It serves as both the electrode and a means of gas distribution.
The electrode function is to generate plasma in the process of etching or other treatments. The showerhead design affects the uniformity of plasma distribution and the efficiency of the process.
Shower Head, widely used in semiconductor integrated circuit manufacturing process PVD, CVD, PECVD, etching and other processes, is a key component in various gas distribution process.
The product has the characteristics of high precision, high cleanliness, multi-composite surface treatment
(such as sandblasting/anodizing/brush nickel plating/electrolytic polishing).
Our company can provides different part number of silicon/ SiC electrode and Showerhead. Welcome to inqure.
Main Products:
Electrode Si / SiC
Ring Si / SiC / Quartz
Applicator Quartz / Sapphire
LAM Silicon Electrode
839-011906-001
839-011906-002
839-011906-100
839-011906-902
839-443215-502
839-011907-001
839-011907-111
839-443215-504
Quartz Tube
0190-02635
0190-34419
0190-37894
0040-71417
3750-01144
3750-01112
5010-3900430
5010-3900490
Quartz Applicator Tube
765-065782-001
765-065782-002
765-013511-001
765-013511-003
765-013511-004
765-013511-005
790-097959-001
790-097959-002
Sapphire Applicator Tube
SA7610QTZ2
SA7610QTZ4
SA7610QTZ6
SA7610SAPP3
SA7610SAPP6
SA7610SAPP7
Chemical Downstream Plasma Source
AX7610
AX7610LRC-S
AX7610-5-REV 1L
AX7610LRC-Q
AX9013
AX9016
716-140141-261, Hot Edge Ring
1D10-309946-12, DRM Focus Ring
Ring Upper Ground SiC
Y2O3 Top Ring
Y2O3 Bottom Ring
Email:info@achimie.cn achimie@outlook.com
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